Inventor
ZHANG GUOQIANG DAVID
US9 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG GUOQIANG DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MEMC ELECTRONIC MATERIALS
4 patentsUS6454635B1Sep 24, 2002
Method and apparatus for a wafer carrier having an insert
MEMC ELECTRONIC MATERIALS58 citations95
US6709981B2Mar 23, 2004
Method and apparatus for processing a semiconductor wafer using novel final polishing method
MEMC ELECTRONIC MATERIALS52 citations89
US7323421B2Jan 29, 2008
Silicon wafer etching process and composition
MEMC ELECTRONIC MATERIALS26 citations88
US6179950B1Jan 30, 2001
Polishing pad and process for forming same
MEMC ELECTRONIC MATERIALS18 citations79