Inventor · disambiguated record
Godefridus Cornelius Antonius Couweleers
Also filed as: COUWELEERS GODEFRIDUS CORNELIUS ANTONIUS
8 granted patents·1 pending application·12 citations·filing 2012–2017
81Inventor score
Top patents by PatentIndex Score
9 records- 0181US9069265B2Interferometer moduleDE BOER GUIDO·Filed 2012·Granted Jun 30, 2015·4 cites·25 claims
- 0278US9261800B2Alignment of an interferometer module for use in an exposure toolDE BOER GUIDO·Filed 2012·Granted Feb 16, 2016·2 cites·18 claims
- 0371US9383662B2Lithography system for processing at least a part of a targetVERGEER NIELS·Filed 2012·Granted Jul 5, 2016·3 cites·31 claims
- 0468US9201315B2Lithography system for processing a target, such as a wafer, a method for operating a lithography system for processing a target, such as a wafer and a substrate for use in such a lithography systemDE BOER GUIDO·Filed 2012·Granted Dec 1, 2015·2 cites·29 claims
- 0556US2017277043A1Lithography system with differential interferometer moduleMAPPER LITHOGRAPHY IP BV·Filed 2017·Application pending·0 cites
- 0655US9678443B2Lithography system with differential interferometer moduleDE BOER GUIDO·Filed 2012·Granted Jun 13, 2017·0 cites·42 claims
- 0755US9551563B2Multi-axis differential interferometerMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted Jan 24, 2017·1 cites·19 claims
- 0852US9690215B2Interferometer moduleMAPPER LITHOGRAPHY IP BV·Filed 2015·Granted Jun 27, 2017·0 cites·22 claims
- 0946US9395636B2Lithography system for processing a target, such as a wafer, and a method for operating a lithography system for processing a target, such as a waferDE BOER GUIDO·Filed 2012·Granted Jul 19, 2016·0 cites·12 claims
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