Inventor
KURUSU KENTO
JP8 patents
Patents
8 patentsUSD719591SDec 16, 2014
Substrate cleaning tool
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USD719199SDec 9, 2014
Substrate cleaning tool
TOKYO ELECTRON LTD11 citations81
USD843118SMar 19, 2019
Cleaning brush
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US10643865B2May 5, 2020
Substrate cleaning apparatus
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US9691646B2Jun 27, 2017
Substrate processing apparatus, substrate detection method of substrate processing apparatus and storage medium
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US11482428B2Oct 25, 2022
Substrate processing apparatus and substrate processing method
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US10290518B2May 14, 2019
Substrate liquid processing apparatus
TOKYO ELECTRON LTD0 citations39
US9238256B2Jan 19, 2016
Substrate processing scrubber, substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations39