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Substrate cleaning tool

59
Assignee: TOKYO ELECTRON LTDPriority: Apr 17, 2013Filed: Sep 9, 2013Granted: Dec 9, 2014
Est. expiryApr 17, 2033(~6.8 yrs left)· nominal 20-yr term from priority
Inventors:Kento Kurusu
59
PatentIndex Score
11
Cited by
12
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a substrate cleaning tool, as shown and described.

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