Inventor · disambiguated record
Zhongxin Wen
Also filed as: WEN ZHONGXIN
3 granted patents·1 pending application·0 citations·filing 2017–2019
39Inventor score
Technology areasH10P
Files withEBARA CORP4
Top patents by PatentIndex Score
4 records- 0150US11919048B2Method of cleaning an optical film-thickness measuring systemEBARA CORP·Filed 2019·Granted Mar 5, 2024·0 cites·11 claims
- 0239US10556314B2Head height adjustment device and substrate processing apparatus provided with head height adjustment deviceEBARA CORP·Filed 2017·Granted Feb 11, 2020·0 cites·15 claims
- 0338US11221239B2Substrate processing apparatus and method of detecting indentation formed in substrateEBARA CORP·Filed 2018·Granted Jan 11, 2022·0 cites·18 claims
- 0436US2017352573A1Substrate processing apparatusEBARA CORP·Filed 2017·Application pending·0 cites
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