P

Inventor

NAKAYOSHI YUICHI

JP11 patents
⚠️ This page may combine multiple inventors who share the name “NAKAYOSHI YUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOMATSU DENSHI KINZOKU KK

7 patents
US5863829AJan 26, 1999

Process for fabricating SOI substrate

KOMATSU DENSHI KINZOKU KK61 citations96
US6090688AJul 18, 2000

Method for fabricating an SOI substrate

KOMATSU DENSHI KINZOKU KK31 citations92
US5893755AApr 13, 1999

Method of polishing a semiconductor wafer

KOMATSU DENSHI KINZOKU KK22 citations91
US6001007ADec 14, 1999

Template used for polishing a semiconductor wafer

KOMATSU DENSHI KINZOKU KK18 citations83
US6004860ADec 21, 1999

SOI substrate and a method for fabricating the same

KOMATSU DENSHI KINZOKU KK15 citations73
US6517667B1Feb 11, 2003

Apparatus for polishing a semiconductor wafer

KOMATSU DENSHI KINZOKU KK8 citations72
US6495465B2Dec 17, 2002

Method for appraising the condition of a semiconductor polishing cloth

KOMATSU DENSHI KINZOKU KK2 citations62

TAKAI HIROSHI

2 patents
US8545712B2Oct 1, 2013

Semiconductor wafer manufacturing method

TAKAI HIROSHI1 citations44
US9073173B2Jul 7, 2015

Method for shape modification of polishing pad

TAKAI HIROSHI0 citations40

NAKAYOSHI YUICHI

1 patent
US8296961B2Oct 30, 2012

Polishing pad thickness measuring method and polishing pad thickness measuring device

NAKAYOSHI YUICHI9 citations76

OGATA SHINICHI

1 patent
US8728942B2May 20, 2014

Method for producing epitaxial silicon wafer

OGATA SHINICHI3 citations57