Inventor · disambiguated record
Bhaskar Nagabhirava
Also filed as: NAGABHIRAVA BHASKAR
8 granted patents·1 pending application·34 citations·filing 2013–2021
81Inventor score
Top patents by PatentIndex Score
9 records- 0190US8668835B1Method of etching self-aligned vias and trenches in a multi-layer film stackLAM RES CORP·Filed 2013·Granted Mar 11, 2014·21 cites·20 claims
- 0284US8906810B2Pulsed dielectric etch process for in-situ metal hard mask shape control to enable void-free metallizationLAM RES CORP·Filed 2013·Granted Dec 9, 2014·7 cites·17 claims
- 0381US10037890B2Method for selectively etching with reduced aspect ratio dependenceLAM RES CORP·Filed 2016·Granted Jul 31, 2018·3 cites·18 claims
- 0478US9412609B1Highly selective oxygen free silicon nitride etchLAM RES CORP·Filed 2015·Granted Aug 9, 2016·3 cites·13 claims
- 0555US12261044B2Multi-layer hardmask for defect reduction in EUV patterningLAM RES CORP·Filed 2021·Granted Mar 25, 2025·0 cites·21 claims
- 0653US10541141B2Method for selectively etching with reduced aspect ratio dependenceLAM RES CORP·Filed 2018·Granted Jan 21, 2020·0 cites·20 claims
- 0751US12237175B2Polymerization protective liner for reactive ion etch in patterningLAM RES CORP·Filed 2020·Granted Feb 25, 2025·0 cites·20 claims
- 0842US2015155176A1Sidewall height nonuniformity reduction for sidewall image transfer processesST MICROELECTRONICS INC·Filed 2013·Application pending·0 cites
- 0939US10002773B2Method for selectively etching silicon oxide with respect to an organic maskLAM RES CORP·Filed 2016·Granted Jun 19, 2018·0 cites·18 claims
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