Inventor
SINGHA ROY SUSMIT
US22 patents
Patents
22 patentsUS10998329B2May 4, 2021
Methods and apparatus for three dimensional NAND structure fabrication
APPLIED MATERIALS INC11 citations85
US10410869B2Sep 10, 2019
CVD based oxide-metal multi structure for 3D NAND memory devices
APPLIED MATERIALS INC8 citations84
US12394670B2Aug 19, 2025
Nucleation-free gap fill ALD process
APPLIED MATERIALS INC0 citations62
US12381086B2Aug 5, 2025
Low temperature graphene growth
APPLIED MATERIALS INC0 citations62
US12288717B2Apr 29, 2025
Metal based hydrogen barrier
APPLIED MATERIALS INC0 citations62
US12198936B2Jan 14, 2025
Defect free germanium oxide gap fill
APPLIED MATERIALS INC0 citations62
US12020982B2Jun 25, 2024
Metal based hydrogen barrier
APPLIED MATERIALS INC0 citations62
US11990369B2May 21, 2024
Selective patterning with molecular layer deposition
APPLIED MATERIALS INC1 citations62
US11817320B2Nov 14, 2023
CVD based oxide-metal multi structure for 3D NAND memory devices
APPLIED MATERIALS INC0 citations62
US11791155B2Oct 17, 2023
Diffusion barriers for germanium
APPLIED MATERIALS INC0 citations62
US11756785B2Sep 12, 2023
Molecular layer deposition contact landing protection for 3D NAND
APPLIED MATERIALS INC0 citations62
US11705335B2Jul 18, 2023
Conformal high concentration boron doping of semiconductors
APPLIED MATERIALS INC0 citations62
US11545504B2Jan 3, 2023
Methods and apparatus for three dimensional NAND structure fabrication
APPLIED MATERIALS INC0 citations62
US11515163B2Nov 29, 2022
Low temperature graphene growth
APPLIED MATERIALS INC1 citations62
US11430801B2Aug 30, 2022
Methods and apparatus for three dimensional NAND structure fabrication
APPLIED MATERIALS INC0 citations62
US11972940B2Apr 30, 2024
Area selective carbon-based film deposition
APPLIED MATERIALS INC1 citations61
US11830734B2Nov 28, 2023
Thermal deposition of silicon-germanium
APPLIED MATERIALS INC0 citations61
US12300491B2May 13, 2025
Deposition of semiconductor integration films
APPLIED MATERIALS INC0 citations60
US11886120B2Jan 30, 2024
Deposition of semiconductor integration films
APPLIED MATERIALS INC1 citations60
US11562904B2Jan 24, 2023
Deposition of semiconductor integration films
APPLIED MATERIALS INC1 citations60
US12084764B2Sep 10, 2024
Vapor phase photoresists deposition
APPLIED MATERIALS INC0 citations49
US12525446B2Jan 13, 2026
Large area gapfill using volumetric expansion
APPLIED MATERIALS INC0 citations45