Inventor
TONAI ATSUSHI
JP4 patents
Patents
4 patentsUS6086699AJul 11, 2000
Thin film-forming method and thin film-forming apparatus therefor
CATALYSTS & CHEM IND CO21 citations92
US6562465B1May 13, 2003
Coating liquid for forming a silica-containing film with a low-dielectric constant and substrate coated with such a film
CATALYSTS & CHEM IND CO45 citations91
US6340641B1Jan 22, 2002
Substrate flattening method and film-coated substrate made thereby
CATALYSTS & CHEM IND CO47 citations90
US7163892B2Jan 16, 2007
Process for producing integrated circuit, and substrate with integrated circuit
CATALYSTS & CHEM IND CO1 citations51