Inventor
NAKATA REMPEI
JP38 patents
⚠️ This page may combine multiple inventors who share the name “NAKATA REMPEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA KK
32 patentsUS5775980AJul 7, 1998
Polishing method and polishing apparatus
TOSHIBA KK105 citations98
US5607718AMar 4, 1997
Polishing method and polishing apparatus
TOSHIBA KK119 citations98
US5429995AJul 4, 1995
Method of manufacturing silicon oxide film containing fluorine
TOSHIBA KK421 citations97
US5664989ASep 9, 1997
Polishing pad, polishing apparatus and polishing method
TOSHIBA KK74 citations96
US6059920AMay 9, 2000
Semiconductor device polishing apparatus having improved polishing liquid supplying apparatus, and polishing liquid supplying method
TOSHIBA KK59 citations95
US5620925AApr 15, 1997
Method of manufacturing semiconductor device using a hagolen plasma treatment step
TOSHIBA KK22 citations93
US6746969B2Jun 8, 2004
Method of manufacturing semiconductor device
TOSHIBA KK27 citations92
US6703302B2Mar 9, 2004
Method of making a low dielectric insulation layer
TOSHIBA KK19 citations92
US6224464B1May 1, 2001
Polishing method and polisher used in the method
TOSHIBA KK39 citations92
US5119761AJun 9, 1992
Substrate heating apparatus for forming thin films on substrate surface
TOSHIBA KK30 citations92
US6558747B2May 6, 2003
Method of forming insulating film and process for producing semiconductor device
TOSHIBA KK19 citations91
US6534870B1Mar 18, 2003
Apparatus and method for manufacturing a semiconductor device
TOSHIBA KK32 citations91
US5641581AJun 24, 1997
Semiconductor device
TOSHIBA KK20 citations91
US6938638B2Sep 6, 2005
Gas circulating-processing apparatus
TOSHIBA KK13 citations84
US6419557B2Jul 16, 2002
Polishing method and polisher used in the method
TOSHIBA KK14 citations84
US7052971B2May 30, 2006
Method for manufacturing semiconductor device
TOSHIBA KK18 citations83
US6800569B2Oct 5, 2004
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus
TOSHIBA KK12 citations82
US5071789ADec 10, 1991
Method for forming a metal electrical connector to a surface of a semiconductor device adjacent a sidewall of insulation material with metal creep-up extending up that sidewall, and related device
TOSHIBA KK14 citations74
US7785984B2Aug 31, 2010
Manufacturing method for semiconductor device
TOSHIBA KK7 citations73
US7604832B2Oct 20, 2009
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus
TOSHIBA KK7 citations73
US7312018B2Dec 25, 2007
Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus
TOSHIBA KK6 citations73
US6962870B2Nov 8, 2005
Method of manufacturing semiconductor device and semiconductor device
TOSHIBA KK9 citations73
US6828684B2Dec 7, 2004
Semiconductor device and method of manufacturing the same
TOSHIBA KK5 citations73
US6645881B2Nov 11, 2003
Method of forming coating film, method of manufacturing semiconductor device and coating solution
TOSHIBA KK10 citations73
US6566261B2May 20, 2003
Semiconductor device and method of manufacturing the same
TOSHIBA KK8 citations73
US6784092B2Aug 31, 2004
Method of forming insulating film and method of manufacturing semiconductor device
TOSHIBA KK2 citations63
US6436849B1Aug 20, 2002
Method for manufacturing semiconductor device having low dielectric constant insulating film, wafer processing equipment and wafer storing box used in this method
TOSHIBA KK5 citations63
US6096631AAug 1, 2000
Method of manufacturing semiconductor device
TOSHIBA KK6 citations63
US7094681B2Aug 22, 2006
Semiconductor device fabrication method
TOSHIBA KK5 citations62
US6458713B1Oct 1, 2002
Method for manufacturing semiconductor device
TOSHIBA KK5 citations60
US7534717B2May 19, 2009
Method of manufacturing semiconductor device
TOSHIBA KK0 citations51
US9698034B2Jul 4, 2017
Substrate storage container and substrate storage container mounting table
TOSHIBA KK0 citations42