Inventor
KAMATH ARAVIND
US7 patents
Patents
7 patentsUSD933725SOct 19, 2021
Deposition ring for a substrate processing chamber
APPLIED MATERIALS INC52 citations95
USD891382SJul 28, 2020
Process shield for a substrate processing chamber
APPLIED MATERIALS INC55 citations95
USD942516SFeb 1, 2022
Process shield for a substrate processing chamber
APPLIED MATERIALS INC17 citations91
US9888528B2Feb 6, 2018
Substrate support with multiple heating zones
APPLIED MATERIALS INC11 citations83
US11201078B2Dec 14, 2021
Substrate position calibration for substrate supports in substrate processing systems
APPLIED MATERIALS INC2 citations71
US12228395B2Feb 18, 2025
Substrate position calibration for substrate supports in substrate processing systems
APPLIED MATERIALS INC0 citations50
US11939666B2Mar 26, 2024
Methods and apparatus for precleaning and treating wafer surfaces
APPLIED MATERIALS INC0 citations50