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Process shield for a substrate processing chamber

94
Assignee: APPLIED MATERIALS INCPriority: Feb 8, 2019Filed: Feb 8, 2019Granted: Jul 28, 2020
Est. expiryFeb 8, 2039(~12.6 yrs left)· nominal 20-yr term from priority
Inventors:Manjunatha KoppaAravind KamathCheng-Hsiung TsaiManjunath H. VenkataswamappaSteven V. SansoniDavid T. Or
94
PatentIndex Score
55
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21
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Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a process shield for a substrate processing chamber, as shown and described.

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