Inventor · disambiguated record
Manjunatha Koppa
Also filed as: KOPPA MANJUNATHA · KOPPA MANJUNATHA P
22 granted patents·7 pending applications·269 citations·filing 2014–2024
95Inventor score
Files withAPPLIED MATERIALS INC29
Top patents by PatentIndex Score
29 records- 0196US11555244B2High temperature dual chamber showerheadAPPLIED MATERIALS INC·Filed 2020·Granted Jan 17, 2023·4 cites·20 claims
- 0294USD933725SDeposition ring for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Oct 19, 2021·52 cites·1 claims
- 0394USD893441SBase plate for a processing chamber substrate supportAPPLIED MATERIALS INC·Filed 2019·Granted Aug 18, 2020·68 cites·1 claims
- 0494USD891382SProcess shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Jul 28, 2020·55 cites·1 claims
- 0592US9888528B2Substrate support with multiple heating zonesAPPLIED MATERIALS INC·Filed 2015·Granted Feb 6, 2018·11 cites·16 claims
- 0691US10892180B2Lift pin assemblyAPPLIED MATERIALS INC·Filed 2014·Granted Jan 12, 2021·16 cites·15 claims
- 0790USD947914SBase plate for a processing chamber substrate supportAPPLIED MATERIALS INC·Filed 2020·Granted Apr 5, 2022·14 cites·1 claims
- 0887US11887878B2Detachable biasable electrostatic chuck for high temperature applicationsAPPLIED MATERIALS INC·Filed 2020·Granted Jan 30, 2024·2 cites·19 claims
- 0987USD960216SBase plate for a processing chamber substrate supportAPPLIED MATERIALS INC·Filed 2022·Granted Aug 9, 2022·10 cites·1 claims
- 1085US11251028B2Pre-clean chamber with integrated shutter garageAPPLIED MATERIALS INC·Filed 2019·Granted Feb 15, 2022·4 cites·17 claims
- 1185US9984911B2Electrostatic chuck design for high temperature RF applicationsAPPLIED MATERIALS INC·Filed 2015·Granted May 29, 2018·4 cites·20 claims
- 1283US9613846B2Pad design for electrostatic chuck surfaceAPPLIED MATERIALS INC·Filed 2014·Granted Apr 4, 2017·5 cites·9 claims
- 1379USD942516SProcess shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted Feb 1, 2022·17 cites·1 claims
- 1479US10704142B2Quick disconnect resistance temperature detector assembly for rotating pedestalAPPLIED MATERIALS INC·Filed 2017·Granted Jul 7, 2020·2 cites·20 claims
- 1571US10711348B2Apparatus to improve substrate temperature uniformityAPPLIED MATERIALS INC·Filed 2015·Granted Jul 14, 2020·2 cites·19 claims
- 1667US2025029816A1Heated metal lid for selective pecvdAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1765US2024375066A1Recursive Flow Gas MixerAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1864US10373860B2Batch processing apparatusAPPLIED MATERIALS INC·Filed 2015·Granted Aug 6, 2019·1 cites·20 claims
- 1959US12016092B2Gas distribution ceramic heater for deposition chamberAPPLIED MATERIALS INC·Filed 2020·Granted Jun 18, 2024·0 cites·20 claims
- 2054USD1089130SProcess chamber manifoldAPPLIED MATERIALS INC·Filed 2024·Granted Aug 19, 2025·1 cites·1 claims
- 2154US2023307211A1Process Chamber And Process Kits For Advanced PackagingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2252US2021032753A1Methods and apparatus for dual channel showerheadsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 2349US2023374660A1Hardware to uniformly distribute active species for semiconductor film processingAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2446USD997893SShadow ring lift plateAPPLIED MATERIALS INC·Filed 2021·Granted Sep 5, 2023·1 cites·1 claims
- 2544US2016002778A1Substrate support with more uniform edge purgeAPPLIED MATERIALS INC·Filed 2014·Application pending·0 cites
- 2635US2018197760A1Dual PVD Chamber And Hybrid PVD-CVD ChambersAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 2733USD1101709SProcess chamber shower headAPPLIED MATERIALS INC·Filed 2024·Granted Nov 11, 2025·0 cites·1 claims
- 2831USD1009817SShadow ring lift pinAPPLIED MATERIALS INC·Filed 2021·Granted Jan 2, 2024·0 cites·1 claims
- 2929USD997894SShadow ring lift assemblyAPPLIED MATERIALS INC·Filed 2021·Granted Sep 5, 2023·0 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →