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Base plate for a processing chamber substrate support

94
Assignee: APPLIED MATERIALS INCPriority: Jun 28, 2019Filed: Jun 28, 2019Granted: Aug 18, 2020
Est. expiryJun 28, 2039(~13 yrs left)· nominal 20-yr term from priority
Inventors:Shreesha Yogish RaoMukund SundararajanCheng-Hsiung TsaiManjunatha KoppaSteven V. Sansoni
94
PatentIndex Score
68
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17
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1
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Claims

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CLAIM 
     
       The ornamental design for a base plate for a processing chamber substrate support, as shown and described.

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