Inventor · disambiguated record
Shreesha Yogish Rao
Also filed as: RAO SHREESHA Y · RAO SHREESHA YOGISH
9 granted patents·2 pending applications·97 citations·filing 2016–2023
85Inventor score
Top patents by PatentIndex Score
11 records- 0194USD893441SBase plate for a processing chamber substrate supportAPPLIED MATERIALS INC·Filed 2019·Granted Aug 18, 2020·68 cites·1 claims
- 0290USD947914SBase plate for a processing chamber substrate supportAPPLIED MATERIALS INC·Filed 2020·Granted Apr 5, 2022·14 cites·1 claims
- 0387US11887878B2Detachable biasable electrostatic chuck for high temperature applicationsAPPLIED MATERIALS INC·Filed 2020·Granted Jan 30, 2024·2 cites·19 claims
- 0487USD960216SBase plate for a processing chamber substrate supportAPPLIED MATERIALS INC·Filed 2022·Granted Aug 9, 2022·10 cites·1 claims
- 0578US11024529B2System and method for residual voltage control of electrostatic chucking assembliesAPPLIED MATERIALS INC·Filed 2018·Granted Jun 1, 2021·2 cites·7 claims
- 0668US10184183B2Substrate temperature monitoringAPPLIED MATERIALS INC·Filed 2016·Granted Jan 22, 2019·1 cites·13 claims
- 0763US11772137B2Reactive cleaning of substrate supportAPPLIED MATERIALS INC·Filed 2021·Granted Oct 3, 2023·0 cites·20 claims
- 0854US10460969B2Bipolar electrostatic chuck and method for using the sameAPPLIED MATERIALS INC·Filed 2017·Granted Oct 29, 2019·0 cites·20 claims
- 0953US10410899B2Bipolar electrostatic chuck and method for using the sameAPPLIED MATERIALS INC·Filed 2017·Granted Sep 10, 2019·0 cites·20 claims
- 1049US2025323086A1Improved pedestals for substrate processing systemsLAM RES CORP·Filed 2023·Application pending·0 cites
- 1136US2019355607A1Thermally isolated electronics utilities cavity for a substrate carrierAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →