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Base plate for a processing chamber substrate support

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Assignee: APPLIED MATERIALS INCPriority: Nov 23, 2020Filed: Mar 11, 2022Granted: Aug 9, 2022
Est. expiryNov 23, 2040(~14.4 yrs left)· nominal 20-yr term from priority
Inventors:Shreesha Yogish RaoMukund SundararajanCheng-Hsiung TsaiManjunatha KoppaSteven V. Sansoni
87
PatentIndex Score
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33
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Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a base plate for a processing chamber substrate support, as shown and described.

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