Inventor
ENDO KAZUMASA
JP14 patents
⚠️ This page may combine multiple inventors who share the name “ENDO KAZUMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
8 patentsUS6262793B1Jul 17, 2001
Method of manufacturing and using correction member to correct aberration in projection exposure apparatus
NIKON CORP55 citations95
US6084723AJul 4, 2000
Exposure apparatus
NIKON CORP31 citations92
US5903400AMay 11, 1999
Projection-optical system for use in a projection-exposure apparatus
NIKON CORP47 citations92
US5835285ANov 10, 1998
Projection optical system and exposure apparatus using the same
NIKON CORP42 citations91
US6958803B2Oct 25, 2005
Projection exposure apparatus and method with adjustment of rotationally asymmetric optical characteristics
NIKON CORP10 citations73
US6850371B2Feb 1, 2005
Optical member and method of producing the same, and projection aligner
NIKON CORP6 citations72
US6829039B2Dec 7, 2004
Optical member for photolithography and method of evaluating the same
NIKON CORP4 citations62
US7166163B2Jan 23, 2007
Optical member, method of manufacturing the same, and projection exposure system
NIKON CORP1 citations50
NIPPON KOGAKU KK
4 patentsUS4758864AJul 19, 1988
Projection exposure apparatus
NIPPON KOGAKU KK11 citations73
USRE37846ESep 17, 2002
Projection optical system and exposure apparatus using the same
NIPPON KOGAKU KK9 citations72
US4660966AApr 28, 1987
Optical alignment apparatus
NIPPON KOGAKU KK5 citations62
US4723846AFeb 9, 1988
Optical path length compensating optical system in an alignment apparatus
NIPPON KOGAKU KK3 citations60