Inventor
KAWASAKI HIROMICHI
JP9 patents
⚠️ This page may combine multiple inventors who share the name “KAWASAKI HIROMICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
8 patentsUS9378929B2Jun 28, 2016
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP4 citations72
US8951385B2Feb 10, 2015
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP5 citations72
US11600472B2Mar 7, 2023
Vacuum processing apparatus and operating method of vacuum processing apparatus
HITACHI HIGH TECH CORP6 citations70
USD847237SApr 30, 2019
Substrate processing unit
HITACHI HIGH TECH CORP2 citations69
USD831086SOct 16, 2018
Substrate processing unit
HITACHI HIGH TECH CORP1 citations48
USD831085SOct 16, 2018
Substrate processing unit
HITACHI HIGH TECH CORP0 citations48
US10128141B2Nov 13, 2018
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations40
US10522333B2Dec 31, 2019
Vacuum processing apparatus
HITACHI HIGH TECH CORP0 citations38