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Substrate processing unit

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Assignee: HITACHI HIGH TECH CORPPriority: Dec 9, 2016Filed: Jun 7, 2017Granted: Oct 16, 2018
Est. expiryDec 9, 2036(~10.4 yrs left)· nominal 20-yr term from priority
Inventors:Yusaku SakkaHiromichi Kawasaki
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Claims

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CLAIM 
     
       The ornamental design for a substrate processing unit, as shown and described.

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