Assignee
HITACHI HIGH TECH CORP
JP·3,060 granted patents·1,027 pending applications·17,469 citations·filing 2000–2025
Top patents by PatentIndex Score
4,087 records- 0199US8779400B2Ion source, ion beam processing/observation apparatus, charged particle beam apparatus, and method for observing cross section of sampleHITACHI HIGH TECH CORP·Filed 2013·Granted Jul 15, 2014·91 cites·12 claims
- 0299US7761246B2Surface inspection method and surface inspection apparatusHITACHI HIGH TECH CORP·Filed 2009·Granted Jul 20, 2010·97 cites·3 claims
- 0399USD556704SGrounded electrode for a plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Dec 4, 2007·445 cites·1 claims
- 0498US11978612B2Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2022·Granted May 7, 2024·3 cites·16 claims
- 0598US11043359B2Charged particle beam apparatus and charged particle beam inspection systemHITACHI HIGH TECH CORP·Filed 2020·Granted Jun 22, 2021·14 cites·10 claims
- 0698USD840364SElectrode cover for a plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2017·Granted Feb 12, 2019·453 cites·1 claims
- 0798USD827592SElectrode cover for a plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2017·Granted Sep 4, 2018·448 cites·1 claims
- 0898USD770992SElectrode cover for a plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2015·Granted Nov 8, 2016·107 cites·1 claims
- 0998USD633514SComputer display with graphical user interfaceHITACHI HIGH TECH CORP·Filed 2009·Granted Mar 1, 2011·193 cites·1 claims
- 1098USD630645SGraphical user interface for a computer displayHITACHI HIGH TECH CORP·Filed 2009·Granted Jan 11, 2011·107 cites·1 claims
- 1198USD630649SGraphical user interface for a computer displayHITACHI HIGH TECH CORP·Filed 2009·Granted Jan 11, 2011·162 cites·1 claims
- 1298USD614192SGraphical user interface for a computer displayHITACHI HIGH TECH CORP·Filed 2008·Granted Apr 20, 2010·303 cites·1 claims
- 1398USD614191SGraphical user interface for a computer displayHITACHI HIGH TECH CORP·Filed 2008·Granted Apr 20, 2010·305 cites·1 claims
- 1498US7582885B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Sep 1, 2009·61 cites·5 claims
- 1598US7388979B2Method and apparatus for inspecting pattern defectsHITACHI HIGH TECH CORP·Filed 2004·Granted Jun 17, 2008·136 cites·22 claims
- 1698USD557226SElectrode cover for a plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2005·Granted Dec 11, 2007·619 cites·1 claims
- 1797US9824938B2Charged particle beam device and inspection deviceHITACHI HIGH TECH CORP·Filed 2015·Granted Nov 21, 2017·20 cites·15 claims
- 1897US7880143B2Electron beam apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 1, 2011·54 cites·17 claims
- 1997USD630648SGraphical user interface for a computer displayHITACHI HIGH TECH CORP·Filed 2009·Granted Jan 11, 2011·101 cites·1 claims
- 2097US7664608B2Defect inspection method and apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 16, 2010·37 cites·26 claims
- 2197USD602496SGraphical user interface for a computer displayHITACHI HIGH TECH CORP·Filed 2008·Granted Oct 20, 2009·126 cites·1 claims
- 2297USD595863SAdapter for a sample rackHITACHI HIGH TECH CORP·Filed 2008·Granted Jul 7, 2009·90 cites·1 claims
- 2397US7559047B2Method and apparatus for creating imaging recipeHITACHI HIGH TECH CORP·Filed 2006·Granted Jul 7, 2009·36 cites·15 claims
- 2497USD595420SAdapter for a sample rackHITACHI HIGH TECH CORP·Filed 2008·Granted Jun 30, 2009·93 cites·1 claims
- 2597USD595421SAdapter for a sample rackHITACHI HIGH TECH CORP·Filed 2008·Granted Jun 30, 2009·91 cites·1 claims
- 2697US7528942B2Method and apparatus for detecting defectsHITACHI HIGH TECH CORP·Filed 2006·Granted May 5, 2009·32 cites·8 claims
- 2797US7465935B2Method for inspecting pattern defect and device for realizing the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 16, 2008·45 cites·8 claims
- 2897US7333192B2Apparatus and method for inspecting defectsHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 19, 2008·37 cites·20 claims
- 2997US7248352B2Method for inspecting defect and apparatus for inspecting defectHITACHI HIGH TECH CORP·Filed 2003·Granted Jul 24, 2007·66 cites·4 claims
- 3097US7211797B2Inspection method and inspection system using charged particle beamHITACHI HIGH TECH CORP·Filed 2005·Granted May 1, 2007·28 cites·15 claims
- 3197US7098055B2Apparatus and method for testing defectsHITACHI HIGH TECH CORP·Filed 2005·Granted Aug 29, 2006·36 cites·7 claims
- 3297USD523153SMain part for immunity analysis machineHITACHI HIGH TECH CORP·Filed 2004·Granted Jun 13, 2006·148 cites·1 claims
- 3397US6875477B2Method for coating internal surface of plasma processing chamberHITACHI HIGH TECH CORP·Filed 2003·Granted Apr 5, 2005·411 cites·7 claims
- 3496US11398367B2Charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2020·Granted Jul 26, 2022·4 cites·11 claims
- 3596US10008370B2Plasma processing apparatus and operation method thereofHITACHI HIGH TECH CORP·Filed 2015·Granted Jun 26, 2018·23 cites·5 claims
- 3696US9211543B2Holder for transferring test tubeHITACHI HIGH TECH CORP·Filed 2012·Granted Dec 15, 2015·61 cites·20 claims
- 3796US8033714B2Fluid mixing apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Oct 11, 2011·77 cites·5 claims
- 3896US7964140B2Automatic analyzerHITACHI HIGH TECH CORP·Filed 2010·Granted Jun 21, 2011·29 cites·3 claims
- 3996US7767147B2Substrate for transporting liquid, a system for analysis and a method for analysisHITACHI HIGH TECH CORP·Filed 2005·Granted Aug 3, 2010·48 cites·18 claims
- 4096US7710557B2Surface defect inspection method and apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted May 4, 2010·24 cites·7 claims
- 4196US7683319B2Charge control apparatus and measurement apparatus equipped with the charge control apparatusHITACHI HIGH TECH CORP·Filed 2006·Granted Mar 23, 2010·36 cites·14 claims
- 4296USD595862SAdapter for a sample rackHITACHI HIGH TECH CORP·Filed 2008·Granted Jul 7, 2009·75 cites·1 claims
- 4396US7485858B1Inspection method for semiconductor wafer and apparatus for reviewing defectsHITACHI HIGH TECH CORP·Filed 2006·Granted Feb 3, 2009·23 cites·3 claims
- 4496US7474394B2Apparatus of inspecting defect in semiconductor and method of the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Jan 6, 2009·27 cites·13 claims
- 4596US7366620B2Evaluation method of fine pattern feature, its equipment, and method of semiconductor device fabricationHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 29, 2008·30 cites·15 claims
- 4696US7364956B2Method for manufacturing semiconductor devicesHITACHI HIGH TECH CORP·Filed 2005·Granted Apr 29, 2008·163 cites·4 claims
- 4796US7326942B2Ion beam system and machining methodHITACHI HIGH TECH CORP·Filed 2005·Granted Feb 5, 2008·24 cites·16 claims
- 4896US7223983B2Charged particle beam columnHITACHI HIGH TECH CORP·Filed 2005·Granted May 29, 2007·35 cites·11 claims
- 4995US12191121B2Plasma processing apparatusHITACHI HIGH TECH CORP·Filed 2022·Granted Jan 7, 2025·2 cites·4 claims
- 5095US12068128B2Charged particle beam systemHITACHI HIGH TECH CORP·Filed 2022·Granted Aug 20, 2024·2 cites·16 claims
Showing the top 50 of 4,087 patent records by PatentIndex Score.
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