Inventor
TSAI SHIN-YEU
TW18 patents
Patents
18 patentsUS9881918B1Jan 30, 2018
Forming doped regions in semiconductor strips
TAIWAN SEMICONDUCTOR MFG CO LTD27 citations93
US9881834B1Jan 30, 2018
Contact openings and methods forming same
TAIWAN SEMICONDUCTOR MFG CO LTD14 citations91
US10269796B2Apr 23, 2019
Forming doped regions in semiconductor strips
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US9558955B2Jan 31, 2017
Formation method of semiconductor device that includes performing hydrogen-containing plasma treatment on metal gate stack
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations71
US9960074B2May 1, 2018
Integrated bi-layer STI deposition
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US10978341B2Apr 13, 2021
Contact openings and methods forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11049945B2Jun 29, 2021
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10276677B2Apr 30, 2019
Semiconductor device structure and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations60
US12507472B2Dec 23, 2025
Method of making polysilicon structure including protective layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12051614B2Jul 30, 2024
Isolation regions including two layers and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11855086B2Dec 26, 2023
Polysilicon structure including protective layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11031280B2Jun 8, 2021
Isolation regions including two layers and method forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10957697B2Mar 23, 2021
Polysilicon structure including protective layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US9324603B2Apr 26, 2016
Semiconductor structures with shallow trench isolations
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10720430B2Jul 21, 2020
Forming doped regions in semiconductor strips
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10522541B2Dec 31, 2019
Forming doped regions in semiconductor strips
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US10510593B2Dec 17, 2019
Contact openings and methods forming same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10050035B2Aug 14, 2018
Method of making protective layer over polysilicon structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49