Inventor
CHUANG TZU-SOU
TW13 patents
⚠️ This page may combine multiple inventors who share the name “CHUANG TZU-SOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
10 patentsUS11892382B2Feb 6, 2024
Method for detecting environmental parameter in semiconductor fabrication facility
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12343684B2Jul 1, 2025
Filter apparatus for semiconductor device fabrication process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11826709B2Nov 28, 2023
Filter apparatus for semiconductor device fabrication process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12202015B2Jan 21, 2025
Airborne contaminant management method and system
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12020962B2Jun 25, 2024
Measuring system and method of measuring static charges
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12140342B2Nov 12, 2024
Makeup air handling unit in semiconductor fabrication building and method for cleaning air using the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12251786B2Mar 18, 2025
Filter apparatus for semiconductor device fabrication process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54
US9958424B2May 1, 2018
Method of identifying airborne molecular contamination source
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US10746635B2Aug 18, 2020
Method and apparatus for inspecting process solution, and sample preparation apparatus in inspection
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49
US9352263B2May 31, 2016
Mechanisms for air treatment system and air treatment method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48