Inventor
CHEN KUO-JU
TW50 patents
⚠️ This page may combine multiple inventors who share the name “CHEN KUO-JU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
48 patentsUS10347762B1Jul 9, 2019
Field effect transistor contact with reduced contact resistance using implantation process
TAIWAN SEMICONDUCTOR MFG CO LTD20 citations94
US11456383B2Sep 27, 2022
Semiconductor device having a contact plug with an air gap spacer
TAIWAN SEMICONDUCTOR MFG CO LTD7 citations86
US10658510B2May 19, 2020
Source/drain structure
TAIWAN SEMICONDUCTOR MFG CO LTD9 citations84
US11289417B2Mar 29, 2022
Semiconductor device and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations83
US10763168B2Sep 1, 2020
Semiconductor structure with doped via plug and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD10 citations82
US11257952B2Feb 22, 2022
Source/drain structure
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11227950B2Jan 18, 2022
Methods of forming air spacers in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10868178B2Dec 15, 2020
Field effect transistor contact with reduced contact resistance using implantation process
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US10347720B2Jul 9, 2019
Doping for semiconductor device with conductive feature
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11211289B2Dec 28, 2021
Metal loss prevention using implantation
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations72
US11145751B2Oct 12, 2021
Semiconductor structure with doped contact plug and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD6 citations72
US10643892B2May 5, 2020
Metal loss prevention using implantation
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US11515206B2Nov 29, 2022
Semiconductor structure with doped via plug
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations71
US12557623B2Feb 17, 2026
Semiconductor device with connecting structure having a doped layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12300740B2May 13, 2025
Metal layer protection during wet etching
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12009305B2Jun 11, 2024
Semiconductor device and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11984491B2May 14, 2024
Metal layer protection during wet etching
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11955553B2Apr 9, 2024
Source/drain structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11791204B2Oct 17, 2023
Semiconductor device with connecting structure having a doped layer and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11652053B2May 16, 2023
Semiconductor device and method for forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11594636B2Feb 28, 2023
Source/drain structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US11049972B2Jun 29, 2021
Formation method of semiconductor device with low resistance contact
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations63
US12484240B2Nov 25, 2025
Semiconductor device and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12432963B2Sep 30, 2025
Device having an air gap adjacent to a contact plug and covered by a doped dielectric layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12419099B2Sep 16, 2025
Method for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12368098B2Jul 22, 2025
Methods of forming semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12243940B2Mar 4, 2025
Methods of forming air spacers in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12224327B2Feb 11, 2025
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12183632B2Dec 31, 2024
Bottom lateral expansion of contact plugs through implantation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12112977B2Oct 8, 2024
Reducing spacing between conductive features through implantation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12068195B2Aug 20, 2024
Metal loss prevention using implantation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12015055B2Jun 18, 2024
Doping for semiconductor device with conductive feature
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11973027B2Apr 30, 2024
Semiconductor device and methods of forming the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11901455B2Feb 13, 2024
Method of manufacturing a FinFET by implanting a dielectric with a dopant
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations62
US11862694B2Jan 2, 2024
Semiconductor device and method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11742386B2Aug 29, 2023
Doping for semiconductor device with conductive feature
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11710659B2Jul 25, 2023
Metal loss prevention using implantation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11682729B2Jun 20, 2023
Methods of forming air spacers in semiconductor devices
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11615982B2Mar 28, 2023
Reducing spacing between conductive features through implantation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11502000B2Nov 15, 2022
Bottom lateral expansion of contact plugs through implantation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11450741B2Sep 20, 2022
Doping for semiconductor device with conductive feature
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12278141B2Apr 15, 2025
Semiconductor devices and methods of manufacture
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11854870B2Dec 26, 2023
Etch method for interconnect structure
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US10950694B2Mar 16, 2021
Doping for semiconductor device with conductive feature
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11908740B2Feb 20, 2024
Semiconductor structure with doped via plug
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10658508B2May 19, 2020
Structure and formation method of semiconductor device with low resistance contact
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10510891B1Dec 17, 2019
Field effect transistor contact with reduced contact resistance using implantation process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US12538544B2Jan 27, 2026
Method for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50