Inventor
TOKUNAGA TAKAFUMI
JP23 patents
⚠️ This page may combine multiple inventors who share the name “TOKUNAGA TAKAFUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
15 patentsUS4931410AJun 5, 1990
Process for producing semiconductor integrated circuit device having copper interconnections and/or wirings, and device produced
HITACHI LTD137 citations97
US6849191B2Feb 1, 2005
Method and apparatus for treating surface of semiconductor
HITACHI LTD24 citations92
US6677244B2Jan 13, 2004
Specimen surface processing method
HITACHI LTD18 citations92
US6660647B1Dec 9, 2003
Method for processing surface of sample
HITACHI LTD28 citations92
US5874013AFeb 23, 1999
Semiconductor integrated circuit arrangement fabrication method
HITACHI LTD18 citations92
US6309980B1Oct 30, 2001
Semiconductor integrated circuit arrangement fabrication method
HITACHI LTD4 citations74
US6074958AJun 13, 2000
Semiconductor integrated circuit arrangement fabrication method
HITACHI LTD9 citations74
US5962347AOct 5, 1999
Semiconductor integrated circuit arrangement fabrication method
HITACHI LTD8 citations74
US6767838B1Jul 27, 2004
Method and apparatus for treating surface of semiconductor
HITACHI LTD11 citations73
US6191045B1Feb 20, 2001
Method of treating surface of sample
HITACHI LTD10 citations73
US7259104B2Aug 21, 2007
Sample surface processing method
HITACHI LTD2 citations63
US6791137B2Sep 14, 2004
Semiconductor integrated circuit device and process for manufacturing the same
HITACHI LTD2 citations63
US6555861B2Apr 29, 2003
Semiconductor integrated circuit device and process for manufacturing the same
HITACHI LTD2 citations63
US6492277B1Dec 10, 2002
Specimen surface processing method and apparatus
HITACHI LTD4 citations63
US7049243B2May 23, 2006
Surface processing method of a specimen and surface processing apparatus of the specimen
HITACHI LTD0 citations52
RENESAS TECH CORP
6 patentsUS6838320B2Jan 4, 2005
Method for manufacturing a semiconductor integrated circuit device
RENESAS TECH CORP8 citations74
US7419902B2Sep 2, 2008
Method of manufacture of semiconductor integrated circuit
RENESAS TECH CORP8 citations72
US7427537B2Sep 23, 2008
Semiconductor integrated circuit device and method for manufacturing the same
RENESAS TECH CORP2 citations63
US7737023B2Jun 15, 2010
Method of manufacture of semiconductor integrated circuit device and semiconductor integrated circuit device
RENESAS TECH CORP5 citations61
US7118949B2Oct 10, 2006
Semiconductor integrated circuit device and method for manufacturing the same
RENESAS TECH CORP1 citations52
USRE39895EOct 23, 2007
Semiconductor integrated circuit arrangement fabrication method
RENESAS TECH CORP0 citations42