Inventor
SERSHEN MICHAEL J
US6 patents
⚠️ This page may combine multiple inventors who share the name “SERSHEN MICHAEL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VEECO INSTR INC
4 patentsUSD908103SJan 19, 2021
Transportable semiconductor wafer rack
VEECO INSTR INC2 citations66
USD908102SJan 19, 2021
Transportable semiconductor wafer rack
VEECO INSTR INC2 citations66
US10844488B2Nov 24, 2020
Chuck systems and methods having enhanced electrical isolation for substrate-biased ALD
VEECO INSTR INC1 citations51
US12400894B2Aug 26, 2025
Automated batch production thin film deposition systems and methods of using the same
VEECO INSTR INC0 citations41