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Transportable semiconductor wafer rack

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Assignee: VEECO INSTR INCPriority: Feb 20, 2019Filed: Feb 20, 2019Granted: Jan 19, 2021
Est. expiryFeb 20, 2039(~12.6 yrs left)· nominal 20-yr term from priority
Inventors:Michael W. PacierMichael J. SershenAdam BertuchLaurent Lecordier
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PatentIndex Score
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Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a transportable semiconductor wafer rack, as shown and described.

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