Assignee
VEECO INSTR INC
US·249 granted patents·93 pending applications·7,003 citations·filing 1978–2025
Top patents by PatentIndex Score
342 records- 0199US10134617B2Wafer carrier having thermal cover for chemical vapor deposition systemsVEECO INSTR INC·Filed 2014·Granted Nov 20, 2018·369 cites·14 claims
- 0298USD819580SSelf-centering wafer carrier for chemical vapor depositionVEECO INSTR INC·Filed 2016·Granted Jun 5, 2018·445 cites·1 claims
- 0398USD810705SSelf-centering wafer carrier for chemical vapor depositionVEECO INSTR INC·Filed 2016·Granted Feb 20, 2018·499 cites·1 claims
- 0497USD793972SWafer carrier with a 31-pocket configurationVEECO INSTR INC·Filed 2015·Granted Aug 8, 2017·27 cites·1 claims
- 0597US7001785B1Capacitance probe for thin dielectric film characterizationVEECO INSTR INC·Filed 2004·Granted Feb 21, 2006·147 cites·8 claims
- 0697US6449048B1Lateral-scanning interferometer with tilted optical axisVEECO INSTR INC·Filed 2000·Granted Sep 10, 2002·110 cites·27 claims
- 0796US6624894B2Scanning interferometry with reference signalVEECO INSTR INC·Filed 2001·Granted Sep 23, 2003·98 cites·26 claims
- 0895US8021487B2Wafer carrier with hubVEECO INSTR INC·Filed 2007·Granted Sep 20, 2011·33 cites·24 claims
- 0995US7770231B2Fast-scanning SPM and method of operating sameVEECO INSTR INC·Filed 2007·Granted Aug 3, 2010·81 cites·26 claims
- 1095US7276124B2Reactor having a movable shutterVEECO INSTR INC·Filed 2005·Granted Oct 2, 2007·50 cites·6 claims
- 1195US7155964B2Method and apparatus for measuring electrical properties in torsional resonance modeVEECO INSTR INC·Filed 2005·Granted Jan 2, 2007·20 cites·36 claims
- 1295US4778561AElectron cyclotron resonance plasma sourceVEECO INSTR INC·Filed 1987·Granted Oct 18, 1988·151 cites·24 claims
- 1394US7748260B2Thermal mechanical drive actuator, thermal probe and method of thermally driving a probeVEECO INSTR INC·Filed 2006·Granted Jul 6, 2010·18 cites·30 claims
- 1494US7037574B2Atomic layer deposition for fabricating thin filmsVEECO INSTR INC·Filed 2001·Granted May 2, 2006·83 cites·30 claims
- 1594US6945099B1Torsional resonance mode probe-based instrument and methodVEECO INSTR INC·Filed 2002·Granted Sep 20, 2005·66 cites·65 claims
- 1694US6862921B2Method and apparatus for manipulating a sampleVEECO INSTR INC·Filed 2001·Granted Mar 8, 2005·60 cites·9 claims
- 1794US6545761B1Embedded interferometer for reference-mirror calibration of interferometric microscopeVEECO INSTR INC·Filed 1999·Granted Apr 8, 2003·124 cites·49 claims
- 1894US6238582B1Reactive ion beam etching method and a thin film head fabricated using the methodVEECO INSTR INC·Filed 1999·Granted May 29, 2001·347 cites·89 claims
- 1994US4465934AParallel charged particle beam exposure systemVEECO INSTR INC·Filed 1982·Granted Aug 14, 1984·57 cites·31 claims
- 2093USD793971SWafer carrier with a 14-pocket configurationVEECO INSTR INC·Filed 2015·Granted Aug 8, 2017·17 cites·1 claims
- 2193USD778247SWafer carrier with a multi-pocket configurationVEECO INSTR INC·Filed 2015·Granted Feb 7, 2017·13 cites·1 claims
- 2293US9273413B2Wafer carrier with temperature distribution controlVEECO INSTR INC·Filed 2013·Granted Mar 1, 2016·7 cites·16 claims
- 2393US7055378B2System for wide frequency dynamic nanomechanical analysisVEECO INSTR INC·Filed 2003·Granted Jun 6, 2006·70 cites·27 claims
- 2493US6794951B2Solid state RF power switching networkVEECO INSTR INC·Filed 2002·Granted Sep 21, 2004·68 cites·30 claims
- 2593US6556305B1Pulsed source scanning interferometerVEECO INSTR INC·Filed 2000·Granted Apr 29, 2003·209 cites·14 claims
- 2693US6280939B1Method and apparatus for DNA sequencing using a local sensitive force detectorVEECO INSTR INC·Filed 1998·Granted Aug 28, 2001·171 cites·28 claims
- 2792USD806046SWafer carrier with a multi-pocket configurationVEECO INSTR INC·Filed 2016·Granted Dec 26, 2017·9 cites·1 claims
- 2892US9388493B2Self-cleaning shutter for CVD reactorVEECO INSTR INC·Filed 2013·Granted Jul 12, 2016·6 cites·11 claims
- 2992US7235139B2Wafer carrier for growing GaN wafersVEECO INSTR INC·Filed 2004·Granted Jun 26, 2007·42 cites·23 claims
- 3092US4184188ASubstrate clamping technique in IC fabrication processesVEECO INSTR INC·Filed 1978·Granted Jan 15, 1980·482 cites·11 claims
- 3191US9978934B2Ion beam etching of STT-RAM structuresVEECO INSTR INC·Filed 2015·Granted May 22, 2018·10 cites·14 claims
- 3290US11248295B2Wafer carrier having retention pockets with compound radii for chemical vapor deposition systemsVEECO INSTR INC·Filed 2018·Granted Feb 15, 2022·3 cites·10 claims
- 3390US10145013B2Wafer carrier having retention pockets with compound radii for chemical vapor desposition systemsVEECO INSTR INC·Filed 2015·Granted Dec 4, 2018·4 cites·13 claims
- 3490US9677944B2Temperature control for GaN based materialsVEECO INSTR INC·Filed 2015·Granted Jun 13, 2017·6 cites·8 claims
- 3590US7275861B2Calibration wafer and method of calibrating in situ temperaturesVEECO INSTR INC·Filed 2005·Granted Oct 2, 2007·21 cites·8 claims
- 3690US6902623B2Reactor having a movable shutterVEECO INSTR INC·Filed 2002·Granted Jun 7, 2005·47 cites·23 claims
- 3790US6299740B1Sputtering assembly and target thereforVEECO INSTR INC·Filed 2000·Granted Oct 9, 2001·60 cites·21 claims
- 3890US4949783ASubstrate transport and cooling apparatus and method for sameVEECO INSTR INC·Filed 1988·Granted Aug 21, 1990·147 cites·6 claims
- 3990US4675796AHigh switching frequency converter auxiliary magnetic winding and snubber circuitVEECO INSTR INC·Filed 1985·Granted Jun 23, 1987·102 cites·22 claims
- 4089US10985046B2Micro-LED transfer methods using light-based debondingVEECO INSTR INC·Filed 2019·Granted Apr 20, 2021·5 cites·25 claims
- 4188US7757544B2Method and apparatus for measuring electrical properties in torsional resonance modeVEECO INSTR INC·Filed 2007·Granted Jul 20, 2010·10 cites·17 claims
- 4288US7605925B1High-definition vertical-scan interferometryVEECO INSTR INC·Filed 2006·Granted Oct 20, 2009·20 cites·9 claims
- 4388US7421370B2Method and apparatus for measuring a characteristic of a sample featureVEECO INSTR INC·Filed 2005·Granted Sep 2, 2008·23 cites·26 claims
- 4488US6672144B2Dynamic activation for an atomic force microscope and method of use thereofVEECO INSTR INC·Filed 2001·Granted Jan 6, 2004·58 cites·14 claims
- 4588US6537428B1Stable high rate reactive sputteringVEECO INSTR INC·Filed 1999·Granted Mar 25, 2003·95 cites·19 claims
- 4688US5969470ACharged particle sourceVEECO INSTR INC·Filed 1996·Granted Oct 19, 1999·59 cites·31 claims
- 4787US10438795B2Self-centering wafer carrier system for chemical vapor depositionVEECO INSTR INC·Filed 2016·Granted Oct 8, 2019·4 cites·40 claims
- 4887US9356188B2Tensile separation of a semiconducting stackVEECO INSTR INC·Filed 2014·Granted May 31, 2016·5 cites·24 claims
- 4987US7716021B2Grid transparency and grid hole pattern control for ion beam uniformityVEECO INSTR INC·Filed 2006·Granted May 11, 2010·11 cites·30 claims
- 5087US7584653B2System for wide frequency dynamic nanomechanical analysisVEECO INSTR INC·Filed 2006·Granted Sep 8, 2009·14 cites·32 claims
Showing the top 50 of 342 patent records by PatentIndex Score.
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