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Wafer carrier with a multi-pocket configuration

93
Assignee: VEECO INSTR INCPriority: Apr 16, 2015Filed: Apr 16, 2015Granted: Feb 7, 2017
Est. expiryApr 16, 2035(~8.8 yrs left)· nominal 20-yr term from priority
Inventors:Alexander I. GuraryMandar DeshpandeAniruddh ParekhYuliy Rashkovsky
H10P 72/7618H10P 72/7606H10P 72/7621C30B 25/00C23C 16/4584
93
PatentIndex Score
13
Cited by
183
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a wafer carrier with a multi-pocket configuration, as shown and described.

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