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Wafer carrier with a 31-pocket configuration

97
Assignee: VEECO INSTR INCPriority: Mar 27, 2015Filed: Mar 27, 2015Granted: Aug 8, 2017
Est. expiryMar 27, 2035(~8.7 yrs left)· nominal 20-yr term from priority
Inventors:Sandeep KrishnanKeng Moy
H10P 72/7621H10P 72/7618C23C 16/4584C23C 16/458
97
PatentIndex Score
27
Cited by
244
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       We claim the ornamental design for a wafer carrier with a 31-pocket configuration, as shown and described.

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