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Self-centering wafer carrier for chemical vapor deposition

98
Assignee: VEECO INSTR INCPriority: Apr 1, 2016Filed: Apr 1, 2016Granted: Feb 20, 2018
Est. expiryApr 1, 2036(~9.7 yrs left)· nominal 20-yr term from priority
Inventors:Sandeep KrishnanAlexander I. GuraryChenghung Paul ChangEarl Marcelo
98
PatentIndex Score
499
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121
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Claims

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CLAIM 
     
       The ornamental design for a self-centering wafer carrier for chemical vapor deposition, as shown and described.

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