USD819580SActiveUtility

Self-centering wafer carrier for chemical vapor deposition

Assignee: VEECO INSTR INCPriority: Apr 1, 2016Filed: Apr 1, 2016Granted: Jun 5, 2018

Est. expiryApr 1, 2036(~9.7 yrs left)· nominal 20-yr term from priority

PatentIndex Score

445

Cited by

110

References

Claims

exact text as granted — not AI-modified

CLAIM 
     
       The ornamental design for a self-centering wafer carrier for chemical vapor deposition, as shown and described.

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