Inventor

SUAREZ EDWIN C

US20 patents

⚠️ This page may combine multiple inventors who share the name “SUAREZ EDWIN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUAREZ EDWIN C

APPLIED MATERIALS INC

Systems and methods for internal surface conditioning in plasma processing equipment

Systems and methods for internal surface conditioning assessment in plasma processing equipment

Blocker plate by-pass for remote plasma clean

Cover ring for use in semiconductor processing chamber

Retaining ring design

Deposition ring of a process kit for semiconductor substrate processing

Deposition ring of a process kit for semiconductor substrate processing

Thin substrate handling via edge clamping

Textured small pad for chemical mechanical polishing

Deposition ring for thin substrate handling via edge clamping

Substrate handling system, method, and apparatus

Grounding ring of a process kit for semiconductor substrate processing

Systems and methods for internal surface conditioning assessment in plasma processing equipment

Systems and methods for internal surface conditioning in plasma processing equipment

Systems and methods for internal surface conditioning in plasma processing equipment

Systems and methods for internal surface conditioning assessment in plasma processing equipment

Semiconductor processing chamber for improved precursor flow

Polishing system with local area rate control and oscillation mode

Local area polishing system and polishing pad assemblies for a polishing system

BAEK JONGHOON

Anti-arc zero field plate