Inventor · disambiguated record
Shinzi Kitamura
Also filed as: KITAMURA SHINZI
6 granted patents·569 citations·filing 1993–1999
89Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD6
Top patents by PatentIndex Score
6 records- 0194US5658615AMethod of forming coating film and apparatus thereforTOKYO ELECTRON LTD·Filed 1994·Granted Aug 19, 1997·187 cites·23 claims
- 0290US6063190AMethod of forming coating film and apparatus thereforTOKYO ELECTRON LTD·Filed 1999·Granted May 16, 2000·94 cites·7 claims
- 0390US5942035ASolvent and resist spin coating apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Aug 24, 1999·103 cites·13 claims
- 0480US5345639ADevice and method for scrubbing and cleaning substrateTOKYO ELECTRON LTD·Filed 1993·Granted Sep 13, 1994·67 cites·9 claims
- 0578US5626675AResist processing apparatus, substrate processing apparatus and method of transferring a processed articleTOKYO ELECTRON LTD·Filed 1994·Granted May 6, 1997·64 cites·15 claims
- 0676US5518552AMethod for scrubbing and cleaning substrateTOKYO ELECTRON LTD·Filed 1994·Granted May 21, 1996·54 cites·10 claims
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