P

Inventor

ARMBRUSTER SIMON

DE35 patents
⚠️ This page may combine multiple inventors who share the name “ARMBRUSTER SIMON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BOSCH GMBH ROBERT

19 patents
US7354786B2Apr 8, 2008

Sensor element with trenched cavity

BOSCH GMBH ROBERT27 citations91
US7918136B2Apr 5, 2011

Micromechanical sensor element

BOSCH GMBH ROBERT10 citations84
US7494839B2Feb 24, 2009

Method for manufacturing a membrane sensor

BOSCH GMBH ROBERT9 citations83
US7843025B2Nov 30, 2010

Micromechanical semiconductor sensor

BOSCH GMBH ROBERT5 citations62
US7647832B2Jan 19, 2010

Micromechanical device and method for producing a micromechanical device

BOSCH GMBH ROBERT6 citations61
US7858424B2Dec 28, 2010

Method for manufacturing a sensor array including a monolithically integrated circuit

BOSCH GMBH ROBERT1 citations52
US7404332B2Jul 29, 2008

Micromechanical component and method

BOSCH GMBH ROBERT0 citations52
US9618740B2Apr 11, 2017

Micromirror and manufacturing method for at least one micromirror which is situatable or situated in a micromirror device

BOSCH GMBH ROBERT0 citations51
US7755152B2Jul 13, 2010

Semiconductor component configured as a diaphragm sensor

BOSCH GMBH ROBERT0 citations51
US7569412B2Aug 4, 2009

Method for manufacturing a diaphragm sensor

BOSCH GMBH ROBERT0 citations51
US9885866B2Feb 6, 2018

Mirror system and projection device

BOSCH GMBH ROBERT0 citations50
US9764945B2Sep 19, 2017

Micromechanical component and corresponding test method for a micromechanical component

BOSCH GMBH ROBERT0 citations49
US10840107B2Nov 17, 2020

Method for forming a cavity and a component having a cavity

BOSCH GMBH ROBERT0 citations48
US10431474B2Oct 1, 2019

Method for forming a cavity and a component having a cavity

BOSCH GMBH ROBERT0 citations48
US9663351B2May 30, 2017

Method for producing a wafer equipped with transparent plates

BOSCH GMBH ROBERT1 citations48
US9490137B2Nov 8, 2016

Method for structuring a layered structure from two semiconductor layers, and micromechanical component

BOSCH GMBH ROBERT0 citations41
US9725311B2Aug 8, 2017

Micromechanical component having hermetic through-contacting, and method for producing a micromechanical component having a hermetic through-contacting

BOSCH GMBH ROBERT0 citations40
US7572661B2Aug 11, 2009

Method for manufacturing a micromechanical sensor element

BOSCH GMBH ROBERT0 citations40
US10589988B2Mar 17, 2020

Mechanical component and manufacturing method for a mechanical component

BOSCH GMBH ROBERT0 citations38

KRAMER TORSTEN

4 patents

WORKAROUND GMBH

3 patents

LAMMEL GERHARD

3 patents

KNESE KATHRIN

1 patent

BENZEL HUBERT

1 patent

KRAFT KARL-HEINZ

1 patent

REINMUTH JOCHEN

1 patent

AHLES MARCUS

1 patent

ARMBRUSTER SIMON

1 patent