Inventor
CEN XI
US13 patents
Patents
13 patentsUSD1066440SMar 11, 2025
Process chamber pumping liner
APPLIED MATERIALS INC2 citations73
US12014956B2Jun 18, 2024
Tungsten gapfill using molybdenum co-flow
APPLIED MATERIALS INC0 citations61
US11776806B2Oct 3, 2023
Multi-step pre-clean for selective metal gap fill
APPLIED MATERIALS INC0 citations61
US11680312B2Jun 20, 2023
Catalyst enhanced seamless ruthenium gap fill
APPLIED MATERIALS INC0 citations61
US11401602B2Aug 2, 2022
Catalyst enhanced seamless ruthenium gap fill
APPLIED MATERIALS INC0 citations61
US11380536B2Jul 5, 2022
Multi-step pre-clean for selective metal gap fill
APPLIED MATERIALS INC1 citations61
US11355391B2Jun 7, 2022
Method for forming a metal gapfill
APPLIED MATERIALS INC0 citations60
US12094773B2Sep 17, 2024
Methods for low resistivity and stress tungsten gap fill
APPLIED MATERIALS INC0 citations57
US11798845B2Oct 24, 2023
Methods and apparatus for low resistivity and stress tungsten gap fill
APPLIED MATERIALS INC0 citations57
US12351909B2Jul 8, 2025
Gap fill methods using catalyzed deposition
APPLIED MATERIALS INC0 citations51
US11859277B2Jan 2, 2024
Catalyst enhanced molybdenum deposition and gap fill
APPLIED MATERIALS INC0 citations50
US12191198B2Jan 7, 2025
Low resistivity tungsten film and method of manufacture
APPLIED MATERIALS INC0 citations48
US12159804B2Dec 3, 2024
Tungsten molybdenum structures
APPLIED MATERIALS INC0 citations47