USD1066440SActiveUtility

Process chamber pumping liner

60
Assignee: APPLIED MATERIALS INCPriority: Oct 28, 2022Filed: Oct 28, 2022Granted: Mar 11, 2025
Est. expiryOct 28, 2042(~16.3 yrs left)· nominal 20-yr term from priority
Inventors:Yang LiXi CenKai WuMin-Han LeeMehran Behdjat
60
PatentIndex Score
2
Cited by
27
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a process chamber pumping liner as shown and described.

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