Inventor · disambiguated record
Mehran Behdjat
Also filed as: BEHDJAT MEHRAN
39 granted patents·6 pending applications·548 citations·filing 2002–2024
97Inventor score
Files withAPPLIED MATERIALS INC31LERNER ALEXANDER N3BEHDJAT MEHRAN2HUNTER AARON MUIR2TSENG MING-KUEI MICHAEL2
Top patents by PatentIndex Score
45 records- 0198USD793526SShowerhead for a semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2016·Granted Aug 1, 2017·302 cites·1 claims
- 0296US8222574B2Temperature measurement and control of wafer support in thermal processing chamberSORABJI KHURSHED·Filed 2008·Granted Jul 17, 2012·62 cites·19 claims
- 0395US7860379B2Temperature measurement and control of wafer support in thermal processing chamberAPPLIED MATERIALS INC·Filed 2007·Granted Dec 28, 2010·27 cites·4 claims
- 0493US9330955B2Support ring with masked edgeAPPLIED MATERIALS INC·Filed 2014·Granted May 3, 2016·10 cites·20 claims
- 0593US7972441B2Thermal oxidation of silicon using ozoneAPPLIED MATERIALS INC·Filed 2005·Granted Jul 5, 2011·22 cites·7 claims
- 0692US9659809B2Support cylinder for thermal processing chamberAPPLIED MATERIALS INC·Filed 2016·Granted May 23, 2017·6 cites·20 claims
- 0790US8056500B2Thermal reactor with improved gas flow distributionTSENG MING-KUEI MICHAEL·Filed 2008·Granted Nov 15, 2011·17 cites·20 claims
- 0889US8608853B2Thermal reactor with improved gas flow distributionTSENG MING-KUEI MICHAEL·Filed 2011·Granted Dec 17, 2013·10 cites·15 claims
- 0989US8198567B2High temperature vacuum chuck assemblyLERNER ALEXANDER N·Filed 2008·Granted Jun 12, 2012·13 cites·20 claims
- 1087US8888916B2Thermal reactor with improved gas flow distributionAPPLIED MATERIALS INC·Filed 2013·Granted Nov 18, 2014·6 cites·20 claims
- 1186US8409353B2Water cooled gas injectorYOKOTA YOSHITAKA·Filed 2011·Granted Apr 2, 2013·6 cites·15 claims
- 1285US10373859B2Support ring with masked edgeAPPLIED MATERIALS INC·Filed 2018·Granted Aug 6, 2019·2 cites·20 claims
- 1385US10056286B2Support ring with masked edgeAPPLIED MATERIALS INC·Filed 2017·Granted Aug 21, 2018·2 cites·20 claims
- 1483US9842759B2Support ring with masked edgeAPPLIED MATERIALS INC·Filed 2016·Granted Dec 12, 2017·2 cites·18 claims
- 1582US10128144B2Support cylinder for thermal processing chamberAPPLIED MATERIALS INC·Filed 2017·Granted Nov 13, 2018·2 cites·20 claims
- 1681US9579750B2Particle control in laser processing systemsHUNTER AARON MUIR·Filed 2012·Granted Feb 28, 2017·6 cites·19 claims
- 1781US8070408B2Load lock chamber for large area substrate processing systemBEHDJAT MEHRAN·Filed 2008·Granted Dec 6, 2011·8 cites·16 claims
- 1877US8896837B1Test apparatus for reflective cavity characterizationAPPLIED MATERIALS INC·Filed 2013·Granted Nov 25, 2014·2 cites·16 claims
- 1976US10000847B2Graphite susceptorAPPLIED MATERIALS INC·Filed 2015·Granted Jun 19, 2018·2 cites·17 claims
- 2073US8256754B2Lift pin for substrate processingLERNER ALEXANDER N·Filed 2007·Granted Sep 4, 2012·6 cites·16 claims
- 2172USD807481SPatterned heater pedestalAPPLIED MATERIALS INC·Filed 2016·Granted Jan 9, 2018·15 cites·1 claims
- 2268US9385004B2Support cylinder for thermal processing chamberAPPLIED MATERIALS INC·Filed 2014·Granted Jul 5, 2016·1 cites·3 claims
- 2367US10665476B2Substrate processing system, valve assembly, and processing methodAPPLIED MATERIALS INC·Filed 2014·Granted May 26, 2020·2 cites·10 claims
- 2467US10453718B2Slit valve door with moving mating partAPPLIED MATERIALS INC·Filed 2013·Granted Oct 22, 2019·1 cites·6 claims
- 2566US10741428B2Semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2017·Granted Aug 11, 2020·1 cites·16 claims
- 2665US8698048B2High temperature vacuum chuck assemblyLERNER ALEXANDER N·Filed 2012·Granted Apr 15, 2014·1 cites·20 claims
- 2764US8528762B2Electron beam welding of large vacuum chamber body having a high emissivity coatingKURITA SHINICHI·Filed 2009·Granted Sep 10, 2013·1 cites·15 claims
- 2864US2024352588A1Enable cvd chamber process wafers at different temperaturesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2963US9140647B2Test apparatus for reflective cavity characterizationAPPLIED MATERIALS INC·Filed 2014·Granted Sep 22, 2015·0 cites·20 claims
- 3062US8567756B2Slit valve door able to compensate for chamber deflectionBEHDJAT MEHRAN·Filed 2009·Granted Oct 29, 2013·1 cites·6 claims
- 3160USD1066440SProcess chamber pumping linerAPPLIED MATERIALS INC·Filed 2022·Granted Mar 11, 2025·2 cites·1 claims
- 3260US8796589B2Processing system with the dual end-effector handlingQUILES EFRAIN·Filed 2002·Granted Aug 5, 2014·9 cites·28 claims
- 3356US2024266215A1Low stress tungsten layer depositionAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3455US12449327B2Method and apparatus for lamp housing crack detectionAPPLIED MATERIALS INC·Filed 2022·Granted Oct 21, 2025·0 cites·20 claims
- 3555US11021794B2Graphite susceptorAPPLIED MATERIALS INC·Filed 2018·Granted Jun 1, 2021·0 cites·19 claims
- 3654USD1089130SProcess chamber manifoldAPPLIED MATERIALS INC·Filed 2024·Granted Aug 19, 2025·1 cites·1 claims
- 3753US2007026693A1Method of Thermally Oxidizing Silicon Using OzoneAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 3852US8915389B2Electron beam welding of large vacuum chamber body having a high emissivity coatingAPPLIED MATERIALS INC·Filed 2013·Granted Dec 23, 2014·0 cites·18 claims
- 3952US8497193B2Method of thermally treating silicon with oxygenYOKOTA YOSHITAKA·Filed 2011·Granted Jul 30, 2013·0 cites·21 claims
- 4049US9514969B2Apparatus for reducing the effect of contamination on a rapid thermal processAPPLIED MATERIALS INC·Filed 2014·Granted Dec 6, 2016·0 cites·11 claims
- 4149US2010011785A1Tube diffuser for load lock chamberAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 4241US2011089166A1Temperature measurement and control of wafer support in thermal processing chamberHUNTER AARON MUIR·Filed 2010·Application pending·0 cites
- 4339US11694919B2Vacuum chuck pressure control systemAPPLIED MATERIALS INC·Filed 2017·Granted Jul 4, 2023·0 cites·7 claims
- 4434US2015228528A1Chucking capability for bowed wafers on dsaAPPLIED MATERIALS INC·Filed 2015·Application pending·0 cites
- 4533US10763141B2Non-contact temperature calibration tool for a substrate support and method of using the sameAPPLIED MATERIALS INC·Filed 2017·Granted Sep 1, 2020·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →