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Showerhead for a semiconductor processing chamber

98
Assignee: APPLIED MATERIALS INCPriority: Apr 8, 2016Filed: Apr 8, 2016Granted: Aug 1, 2017
Est. expiryApr 8, 2036(~9.7 yrs left)· nominal 20-yr term from priority
Inventors:Mehran Behdjat
98
PatentIndex Score
302
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22
References
1
Claims

Claims

exact text as granted — not AI-modified
CLAIM 
     
       The ornamental design for a showerhead for a semiconductor processing chamber, as shown and described.

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