Inventor · disambiguated record
Kai Wu
Also filed as: WU KAI · WU KAI-CHUNG
36 granted patents·15 pending applications·780 citations·filing 2008–2023
97Inventor score
Files withAPPLIED MATERIALS INC39KHANDELWAL AMIT3LEE CHENG-CHUNG2TZU GWO-CHUAN2APPLIED MATERIAL INC1
Top patents by PatentIndex Score
51 records- 0197US8900999B1Low temperature high pressure high H2/WF6 ratio W process for 3D NAND applicationAPPLIED MATERIALS INC·Filed 2013·Granted Dec 2, 2014·423 cites·15 claims
- 0295US9528183B2Cobalt removal for chamber clean or pre-clean processAPPLIED MATERIALS INC·Filed 2014·Granted Dec 27, 2016·25 cites·11 claims
- 0395US7964505B2Atomic layer deposition of tungsten materialsAPPLIED MATERIALS INC·Filed 2008·Granted Jun 21, 2011·166 cites·24 claims
- 0494US7732327B2Vapor deposition of tungsten materialsAPPLIED MATERIALS INC·Filed 2008·Granted Jun 8, 2010·58 cites·25 claims
- 0593US9169556B2Tungsten growth modulation by controlling surface compositionAPPLIED MATERIALS INC·Filed 2013·Granted Oct 27, 2015·9 cites·20 claims
- 0692US8071478B2Method of depositing tungsten film with reduced resistivity and improved surface morphologyWU KAI·Filed 2009·Granted Dec 6, 2011·39 cites·23 claims
- 0789US8865594B2Formation of liner and barrier for tungsten as gate electrode and as contact plug to reduce resistance and enhance device performanceLEE SANG-HYEOB·Filed 2012·Granted Oct 21, 2014·12 cites·17 claims
- 0887US9748105B2Tungsten deposition with tungsten hexafluoride (WF6) etchbackAPPLIED MATERIALS INC·Filed 2014·Granted Aug 29, 2017·8 cites·19 claims
- 0986US10256144B2Process integration approach of selective tungsten via fillAPPLIED MATERIALS INC·Filed 2017·Granted Apr 9, 2019·5 cites·20 claims
- 1086US8617985B2High temperature tungsten metallization processAPPLIED MATERIALS INC·Filed 2012·Granted Dec 31, 2013·7 cites·19 claims
- 1185US8920564B2Methods and apparatus for thermal based substrate processing with variable temperature capabilityTZU GWO-CHUAN·Filed 2011·Granted Dec 30, 2014·4 cites·12 claims
- 1282US10395916B2In-situ pre-clean for selectivity improvement for selective depositionAPPLIED MATERIALS INC·Filed 2017·Granted Aug 27, 2019·3 cites·20 claims
- 1380US11380536B2Multi-step pre-clean for selective metal gap fillAPPLIED MATERIALS INC·Filed 2020·Granted Jul 5, 2022·1 cites·18 claims
- 1480US8835311B2High temperature tungsten metallization processAPPLIED MATERIAL INC·Filed 2013·Granted Sep 16, 2014·4 cites·19 claims
- 1579US9653352B2Methods for forming metal organic tungsten for middle of the line (MOL) applicationsAPPLIED MATERIALS INC·Filed 2014·Granted May 16, 2017·4 cites·20 claims
- 1678US10727119B2Process integration approach of selective tungsten via fillAPPLIED MATERIALS INC·Filed 2019·Granted Jul 28, 2020·2 cites·20 claims
- 1776US9947578B2Methods for forming low-resistance contacts through integrated process flow systemsAPPLIED MATERIALS INC·Filed 2016·Granted Apr 17, 2018·2 cites·19 claims
- 1875US12037682B2Methods for forming low resistivity tungsten featuresAPPLIED MATERIALS INC·Filed 2022·Granted Jul 16, 2024·0 cites·20 claims
- 1975US9783889B2Apparatus for variable substrate temperature controlTZU GWO-CHUAN·Filed 2012·Granted Oct 10, 2017·1 cites·20 claims
- 2072US8513116B2Atomic layer deposition of tungsten materialsKHANDELWAL AMIT·Filed 2012·Granted Aug 20, 2013·2 cites·20 claims
- 2171US8211799B2Atomic layer deposition of tungsten materialsKHANDELWAL AMIT·Filed 2011·Granted Jul 3, 2012·2 cites·22 claims
- 2266US11776806B2Multi-step pre-clean for selective metal gap fillAPPLIED MATERIALS INC·Filed 2022·Granted Oct 3, 2023·0 cites·17 claims
- 2366US2022325410A1Gap fill methods using catalyzed depositionAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2465US9051655B2Boron ionization for aluminum oxide etch enhancementAPPLIED MATERIALS INC·Filed 2013·Granted Jun 9, 2015·1 cites·11 claims
- 2564US12159804B2Tungsten molybdenum structuresAPPLIED MATERIALS INC·Filed 2022·Granted Dec 3, 2024·0 cites·8 claims
- 2663US12094773B2Methods for low resistivity and stress tungsten gap fillAPPLIED MATERIALS INC·Filed 2022·Granted Sep 17, 2024·0 cites·8 claims
- 2762US12351909B2Gap fill methods using catalyzed depositionAPPLIED MATERIALS INC·Filed 2021·Granted Jul 8, 2025·0 cites·6 claims
- 2860USD1066440SProcess chamber pumping linerAPPLIED MATERIALS INC·Filed 2022·Granted Mar 11, 2025·2 cites·1 claims
- 2960US11798845B2Methods and apparatus for low resistivity and stress tungsten gap fillAPPLIED MATERIALS INC·Filed 2020·Granted Oct 24, 2023·0 cites·13 claims
- 3058US12014956B2Tungsten gapfill using molybdenum co-flowAPPLIED MATERIALS INC·Filed 2021·Granted Jun 18, 2024·0 cites·12 claims
- 3156US12486576B2Shadow ring lift to improve wafer edge performanceAPPLIED MATERIALS INC·Filed 2021·Granted Dec 2, 2025·0 cites·19 claims
- 3256US12113020B2Formation of metal vias on metal linesAPPLIED MATERIALS INC·Filed 2021·Granted Oct 8, 2024·0 cites·20 claims
- 3356US2024266215A1Low stress tungsten layer depositionAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3455US2024258109A1Method of depositing a tungsten containing layerAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3554US2024014072A1Nitrogen plasma treatment for bottom-up growthAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3653US2023369113A1Methods for forming multi-tier tungsten featuresAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3753US2019385838A1In-Situ Pre-Clean For Selectivity Improvement For Selective DepositionAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3852US11859277B2Catalyst enhanced molybdenum deposition and gap fillAPPLIED MATERIALS INC·Filed 2021·Granted Jan 2, 2024·0 cites·7 claims
- 3952US2024047268A1Methods for forming multi-tier tungsten featuresAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4051US11355391B2Method for forming a metal gapfillAPPLIED MATERIALS INC·Filed 2020·Granted Jun 7, 2022·0 cites·19 claims
- 4150US12315746B2Bottom cover plate to reduce wafer planar nonuniformityAPPLIED MATERIALS INC·Filed 2021·Granted May 27, 2025·0 cites·20 claims
- 4250US10879081B2Methods of reducing or eliminating defects in tungsten filmAPPLIED MATERIALS INC·Filed 2018·Granted Dec 29, 2020·0 cites·20 claims
- 4349US12191198B2Low resistivity tungsten film and method of manufactureAPPLIED MATERIALS INC·Filed 2020·Granted Jan 7, 2025·0 cites·16 claims
- 4441US2019017165A1Methods And Apparatus For Depositing Tungsten Nucleation LayersAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 4541US2008268635A1Process for forming cobalt and cobalt silicide materials in copper contact applicationsYU SANG-HO·Filed 2008·Application pending·0 cites
- 4640US2012140235A1Method for measuring the film element using optical multi-wavelength interferometryLEE CHENG-CHUNG·Filed 2011·Application pending·0 cites
- 4740US2012140239A1Method for monitoring thin film deposition using dynamic interferometerLEE CHENG-CHUNG·Filed 2011·Application pending·0 cites
- 4838US2018145034A1Methods To Selectively Deposit Corrosion-Free Metal ContactsAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 4937US2018144973A1Electromigration Improvement Using Tungsten For Selective Cobalt Deposition On Copper SurfacesAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 5037US2013012022A1Method for fabricating silicon nanowire arraysUNIV NAT TAIWAN SCIENCE TECH·Filed 2012·Application pending·0 cites
Showing the top 50 of 51 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →