Inventor
ROPS CORNELIUS MARIA
NL37 patents
⚠️ This page may combine multiple inventors who share the name “ROPS CORNELIUS MARIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
26 patentsUS10133190B2Nov 20, 2018
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV5 citations84
US9442390B2Sep 13, 2016
Fluid handling structure including gas supply and gas recovery openings, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV6 citations84
US10416571B2Sep 17, 2019
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV4 citations82
US9588437B2Mar 7, 2017
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV2 citations72
US11231653B2Jan 25, 2022
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV2 citations71
US10969695B2Apr 6, 2021
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV2 citations71
US10551748B2Feb 4, 2020
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV3 citations69
US12429778B2Sep 30, 2025
Fluid handling system, method and lithographic apparatus
ASML NETHERLANDS BV0 citations61
US11614689B2Mar 28, 2023
Fluid handling structure and lithographic apparatus
ASML NETHERLANDS BV0 citations61
US12529964B2Jan 20, 2026
Fluid handling system, method and lithographic apparatus
ASML NETHERLANDS BV0 citations60
US9213246B2Dec 15, 2015
Fluid extraction system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations60
US11860546B2Jan 2, 2024
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11454892B2Sep 27, 2022
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US11029607B2Jun 8, 2021
Fluid handling structure for lithographic apparatus
ASML NETHERLANDS BV0 citations59
US10916453B2Feb 9, 2021
Lithographic apparatus, method of transferring a substrate and device manufacturing method
ASML NETHERLANDS BV0 citations57
US12287580B2Apr 29, 2025
Fluid handling system, method and lithographic apparatus
ASML NETHERLANDS BV0 citations56
US10018921B2Jul 10, 2018
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations52
US9746782B2Aug 29, 2017
Lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations52
US10001712B2Jun 19, 2018
Immersion lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations51
US9971255B2May 15, 2018
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations51
US9291914B2Mar 22, 2016
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations51
US10859919B2Dec 8, 2020
Fluid handling structure, a lithographic apparatus and a device manufacturing method
ASML NETHERLANDS BV0 citations48
US10409174B2Sep 10, 2019
Lithographic apparatus, method of transferring a substrate and device manufacturing method
ASML NETHERLANDS BV0 citations47
US11143969B2Oct 12, 2021
Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus
ASML NETHERLANDS BV0 citations44
US10324384B2Jun 18, 2019
Lithographic apparatus and a method of manufacturing a lithographic apparatus
ASML NETHERLANDS BV0 citations40
US10095129B2Oct 9, 2018
Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus
ASML NETHERLANDS BV0 citations40
BESSEMS DAVID
3 patentsUS8836912B2Sep 16, 2014
Fluid handling structure, a lithographic apparatus and a device manufacturing method
BESSEMS DAVID6 citations81
US9625829B2Apr 18, 2017
Fluid handling structure, a lithographic apparatus and a device manufacturing method
BESSEMS DAVID1 citations49
US9563132B2Feb 7, 2017
Fluid handling structure, a lithographic apparatus and a device manufacturing method
BESSEMS DAVID0 citations38
CORTIE ROGIER HENDRIKUS MAGDALENA
2 patentsUS9069262B2Jun 30, 2015
Fluid handling structure including gas supply and gas recovery openings, lithographic apparatus and device manufacturing method
CORTIE ROGIER HENDRIKUS MAGDALENA7 citations83
US9235138B2Jan 12, 2016
Fluid handling structure, a lithographic apparatus and a device manufacturing method
CORTIE ROGIER HENDRIKUS MAGDALENA3 citations71