Inventor
HIROOKA TAKAAKI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “HIROOKA TAKAAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
5 patentsUS6700089B1Mar 2, 2004
Plasma processing device, its maintenance method, and its installation method
TOKYO ELECTRON LTD399 citations97
US7000416B2Feb 21, 2006
Cooling apparatus and plasma processing apparatus having cooling apparatus
TOKYO ELECTRON LTD48 citations90
US6629423B1Oct 7, 2003
Processor and temperature control method therefor
TOKYO ELECTRON LTD32 citations90
USD459254SJun 25, 2002
Multi-chamber processing apparatus
TOKYO ELECTRON LTD2 citations62
US6579056B2Jun 17, 2003
Cart for mounting/demounting wafer transfer robot
TOKYO ELECTRON LTD6 citations56