USD459254SExpiredUtility

Multi-chamber processing apparatus

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Assignee: TOKYO ELECTRON LTDPriority: Apr 19, 2000Filed: Oct 19, 2000Granted: Jun 25, 2002
Est. expiryApr 19, 2020(expired)· nominal 20-yr term from priority
Inventors:Jun HiroseEiji HiroseJun OzawaTakaaki Hirooka
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exact text as granted — not AI-modified
The ornamental design for a multi-chamber processig apparatus, as shown and described.

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