Inventor · disambiguated record
Takaaki Hirooka
Also filed as: HIROOKA TAKAAKI
7 granted patents·3 pending applications·586 citations·filing 1996–2013
88Inventor score
Top patents by PatentIndex Score
10 records- 0196US6700089B1Plasma processing device, its maintenance method, and its installation methodTOKYO ELECTRON LTD·Filed 2000·Granted Mar 2, 2004·399 cites·8 claims
- 0288US6993919B2Processing apparatus and processing apparatus maintenance methodDAIKIN IND LTD·Filed 2005·Granted Feb 7, 2006·17 cites·3 claims
- 0386US7000416B2Cooling apparatus and plasma processing apparatus having cooling apparatusTOKYO ELECTRON LTD·Filed 2001·Granted Feb 21, 2006·48 cites·14 claims
- 0482US6629423B1Processor and temperature control method thereforTOKYO ELECTRON LTD·Filed 2000·Granted Oct 7, 2003·32 cites·14 claims
- 0552US6579056B2Cart for mounting/demounting wafer transfer robotTOKYO ELECTRON LTD·Filed 2001·Granted Jun 17, 2003·6 cites·12 claims
- 0652US5799288ARemaining money management system with cash demand predictionFUJITSU LTD·Filed 1996·Granted Aug 25, 1998·82 cites·45 claims
- 0747US2015158242A1Imprint device and templateTOKYO ELECTRON LTD·Filed 2013·Application pending·0 cites
- 0842US2013334204A1Plane heating film for integrated gas supply system, and method of manufacturing sameTEM TECH LAB CO LTD·Filed 2013·Application pending·0 cites
- 0942US2006207971A1Atmospheric transfer chamber, processed object transfer method, program for performing the transfer method, and storage medium storing the programTOKYO ELECTRON LTD·Filed 2006·Application pending·0 cites
- 1034USD459254SMulti-chamber processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Jun 25, 2002·2 cites·1 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →