Inventor
TORIYA DAISUKE
JP12 patents
⚠️ This page may combine multiple inventors who share the name “TORIYA DAISUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
10 patentsUS10094019B2Oct 9, 2018
Film forming apparatus
TOKYO ELECTRON LTD4 citations71
US11441224B2Sep 13, 2022
Method of controlling substrate processing apparatus, and substrate processing apparatus
TOKYO ELECTRON LTD2 citations70
US11396704B2Jul 26, 2022
Substrate holder and film forming apparatus
TOKYO ELECTRON LTD3 citations68
US10221478B2Mar 5, 2019
Film formation device
TOKYO ELECTRON LTD1 citations61
US7367350B2May 6, 2008
Processing device and method of maintaining the device
TOKYO ELECTRON LTD5 citations60
US11281116B2Mar 22, 2022
Substrate stage and substrate processing apparatus
TOKYO ELECTRON LTD0 citations58
US11280002B2Mar 22, 2022
Placement apparatus and processing apparatus
TOKYO ELECTRON LTD0 citations50
US10526702B2Jan 7, 2020
Film forming apparatus
TOKYO ELECTRON LTD0 citations50
US11466365B2Oct 11, 2022
Film-forming apparatus
TOKYO ELECTRON LTD0 citations49
US10156014B2Dec 18, 2018
Gas treatment apparatus and gas treatment method
TOKYO ELECTRON LTD0 citations38