Inventor · disambiguated record
Roger J. Yerdon
Also filed as: YERDON ROGER J
6 granted patents·1 pending application·44 citations·filing 1992–2013
81Inventor score
Top patents by PatentIndex Score
7 records- 0185US9097989B2Target and method for mask-to-wafer CD, pattern placement and overlay measurement and controlAUSSCHNITT CHRISTOPHER P·Filed 2009·Granted Aug 4, 2015·8 cites·15 claims
- 0277US9087740B2Fabrication of lithographic image fields using a proximity stitch metrologyIBM·Filed 2013·Granted Jul 21, 2015·4 cites·17 claims
- 0375US8423945B2Methods and systems to meet technology pattern density requirements of semiconductor fabrication processesBICKFORD JEANNE P·Filed 2010·Granted Apr 16, 2013·7 cites·9 claims
- 0467US8039366B2Method for providing rotationally symmetric alignment marks for an alignment system that requires asymmetric geometric layoutIBM·Filed 2009·Granted Oct 18, 2011·3 cites·20 claims
- 0567US5304441AMethod of optimizing exposure of photoresist by patterning as a function of thermal modelingIBM·Filed 1992·Granted Apr 19, 1994·20 cites·5 claims
- 0643US6908830B2Method for printing marks on the edges of wafersIBM·Filed 2003·Granted Jun 21, 2005·2 cites·20 claims
- 0740US2007108638A1Alignment mark with improved resistance to dicing induced cracking and delamination in the scribe regionIBM·Filed 2005·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →