Inventor
ASHIZAWA HIROAKI
JP19 patents
⚠️ This page may combine multiple inventors who share the name “ASHIZAWA HIROAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS9331139B2May 3, 2016
Ruthenium film formation method and storage medium
TOKYO ELECTRON LTD2 citations62
US6407010B1Jun 18, 2002
Single-substrate-heat-processing apparatus and method for semiconductor process
TOKYO ELECTRON LTD4 citations62
US12119219B2Oct 15, 2024
Film forming method, method for manufacturing semiconductor device, film forming device, and system for manufacturing semiconductor device
TOKYO ELECTRON LTD0 citations55
US10340176B2Jul 2, 2019
Substrate mounting method and substrate mounting device
TOKYO ELECTRON LTD0 citations49
US11348794B2May 31, 2022
Semiconductor film forming method using hydrazine-based compound gas
TOKYO ELECTRON LTD0 citations46
US9963784B2May 8, 2018
Film forming method and film forming apparatus
TOKYO ELECTRON LTD1 citations44
US10864548B2Dec 15, 2020
Film forming method and film forming apparatus
TOKYO ELECTRON LTD0 citations40
US8021717B2Sep 20, 2011
Film formation method, cleaning method and film formation apparatus
TOKYO ELECTRON LTD0 citations39
TOTO LTD
7 patentsUS10087109B2Oct 2, 2018
Structure
TOTO LTD3 citations72
US10081576B2Sep 25, 2018
Structure
TOTO LTD3 citations72
US10759710B2Sep 1, 2020
Composite structure, semiconductor manufacturing apparatus and display manufacturing apparatus provided with composite structure
TOTO LTD1 citations58
US12112924B2Oct 8, 2024
Composite structure and semiconductor manufacturing apparatus including composite structure
TOTO LTD0 citations57
US11802085B2Oct 31, 2023
Composite structure and semiconductor manufacturing apparatus including composite structure
TOTO LTD1 citations57
US7897268B2Mar 1, 2011
Composite structure
TOTO LTD2 citations57
US10618847B2Apr 14, 2020
Structure
TOTO LTD0 citations51