Inventor

KAWABUCHI YOSUKE

JP14 patents

⚠️ This page may combine multiple inventors who share the name “KAWABUCHI YOSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

10 patents

US10950465B2Mar 16, 2021

Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus

TOKYO ELECTRON LTD3 citations71

US10692739B2Jun 23, 2020

Substrate processing apparatus

TOKYO ELECTRON LTD2 citations71

US10504718B2Dec 10, 2019

Substrate processing apparatus, substrate processing method, and storage medium

TOKYO ELECTRON LTD5 citations71

US10395950B2Aug 27, 2019

Substrate processing apparatus, substrate processing method, and recording medium

TOKYO ELECTRON LTD5 citations71

US10727042B2Jul 28, 2020

Liquid processing method, substrate processing apparatus and recording medium

TOKYO ELECTRON LTD1 citations59

US10192758B2Jan 29, 2019

Substrate processing apparatus

TOKYO ELECTRON LTD0 citations51

US9805957B2Oct 31, 2017

Substrate processing apparatus, substrate processing method and computer-readable storage medium recording therein substrate processing program

TOKYO ELECTRON LTD0 citations51

US11854815B2Dec 26, 2023

Substrate drying apparatus, substrate drying method and storage medium

TOKYO ELECTRON LTD0 citations50

US9321085B2Apr 26, 2016

Substrate processing method, storage medium storing computer program for implementing substrate processing method and substrate processing apparatus

TOKYO ELECTRON LTD0 citations49

US10867814B2Dec 15, 2020

Liquid processing method, substrate processing apparatus, and storage medium

TOKYO ELECTRON LTD0 citations39

MINAMI TERUOMI

2 patents

US8906165B2Dec 9, 2014

Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus

MINAMI TERUOMI0 citations37

US8545640B2Oct 1, 2013

Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus

MINAMI TERUOMI0 citations37

TANAKA HIROSHI

1 patent

US8475668B2Jul 2, 2013

Substrate liquid processing apparatus, substrate liquid processing method, and storage medium having substrate liquid processing program stored therein

TANAKA HIROSHI6 citations72

SONY CORP

1 patent

US9362106B2Jun 7, 2016

Substrate processing method, substrate processing apparatus, and storage medium

SONY CORP4 citations70