Inventor
GOSHI GENTARO
JP26 patents
Patents
26 patentsUS7186093B2Mar 6, 2007
Method and apparatus for cooling motor bearings of a high pressure pump
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Method and system for cooling a pump
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Substrate processing apparatus, substrate processing method, fluid supplying method and storage medium
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US9662685B2May 30, 2017
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US11446588B2Sep 20, 2022
Substrate processing apparatus and substrate processing method
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US10998186B2May 4, 2021
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US10566182B2Feb 18, 2020
Substrate processing apparatus, substrate processing method, and storage medium
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US10950465B2Mar 16, 2021
Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus
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US10692739B2Jun 23, 2020
Substrate processing apparatus
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US10619922B2Apr 14, 2020
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US10576493B2Mar 3, 2020
Substrate processing apparatus and substrate processing method
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US10504718B2Dec 10, 2019
Substrate processing apparatus, substrate processing method, and storage medium
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US10395950B2Aug 27, 2019
Substrate processing apparatus, substrate processing method, and recording medium
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US12374565B2Jul 29, 2025
Substrate drying method and substrate drying apparatus
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US12142474B2Nov 12, 2024
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US11862486B2Jan 2, 2024
Substrate liquid processing apparatus, substrate liquid processing method and recording medium
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US7211145B2May 1, 2007
Substrate processing apparatus and substrate processing method
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US11201050B2Dec 14, 2021
Substrate processing method, recording medium and substrate processing apparatus
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US12550659B2Feb 10, 2026
Substrate processing apparatus and substrate processing method
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US11594427B2Feb 28, 2023
Substrate processing apparatus and substrate processing method
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US10770316B2Sep 8, 2020
Substrate liquid processing apparatus, substrate liquid processing method and recording medium
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US11557492B2Jan 17, 2023
Substrate processing apparatus and control method thereof
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US11344931B2May 31, 2022
Method of removing particles of substrate processing apparatus, and substrate processing apparatus
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US9865483B2Jan 9, 2018
Substrate liquid processing method, substrate liquid processing apparatus, and recording medium
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US11133176B2Sep 28, 2021
Substrate processing method, recording medium and substrate processing system
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US10062586B2Aug 28, 2018
Chemical fluid processing apparatus and chemical fluid processing method
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