Inventor
MASUZUMI TAKURO
JP10 patents
Patents
10 patentsUS10950465B2Mar 16, 2021
Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus
TOKYO ELECTRON LTD3 citations71
US10692739B2Jun 23, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations71
US10504718B2Dec 10, 2019
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD5 citations71
US10395950B2Aug 27, 2019
Substrate processing apparatus, substrate processing method, and recording medium
TOKYO ELECTRON LTD5 citations71
US11201050B2Dec 14, 2021
Substrate processing method, recording medium and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US10727042B2Jul 28, 2020
Liquid processing method, substrate processing apparatus and recording medium
TOKYO ELECTRON LTD1 citations59
US12469685B2Nov 11, 2025
Surface modifying apparatus and bonding strength determination method
TOKYO ELECTRON LTD0 citations50
US11133176B2Sep 28, 2021
Substrate processing method, recording medium and substrate processing system
TOKYO ELECTRON LTD0 citations49
US10867814B2Dec 15, 2020
Liquid processing method, substrate processing apparatus, and storage medium
TOKYO ELECTRON LTD0 citations39
US10261521B2Apr 16, 2019
Processing apparatus, processing method, and storage medium
TOKYO ELECTRON LTD0 citations39