Inventor
TSUKANO KENTO
JP6 patents
Patents
6 patentsUS10950465B2Mar 16, 2021
Method of cleaning substrate processing apparatus and system of cleaning substrate processing apparatus
TOKYO ELECTRON LTD3 citations71
US10692739B2Jun 23, 2020
Substrate processing apparatus
TOKYO ELECTRON LTD2 citations71
US10576493B2Mar 3, 2020
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD6 citations71
US10504718B2Dec 10, 2019
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD5 citations71
US10395950B2Aug 27, 2019
Substrate processing apparatus, substrate processing method, and recording medium
TOKYO ELECTRON LTD5 citations71
US11133176B2Sep 28, 2021
Substrate processing method, recording medium and substrate processing system
TOKYO ELECTRON LTD0 citations49